Electronic grade silane gas is mainly used in the production of TFT (Thin Film Transistor)/LCD (Liquid Crystal Display) in the display panel industry, as well as the deposition of TFT or LTPS substrates for LCD, etc.
Combination with silane, it can form silicon nitride layers for a-Si transistors.
The production of LTPS and MOS transistors has increased the use of nitrous oxide. From the perspective of consumption and use in MO production, N2O has surpassed NF3 to become the most used electronic material in MO production.
NF3 is the single most used electronic material in a-Si and LTPS display production, mainly for cleaning PECVD chambers.
Copyright © Jinhong Gas Co., Ltd. All Rights Reserved. - Privacy policy|Terms and Conditions