Carbon tetrafluoride is a colorless, odorless and tasteless gas. His is a melting point of -150°C (-184°C), a boiling point of 128°C and a density of 1.96g/cm3.
Tetrafluoromethae may be obtained by the direct fluorination of carbon or by an electro-chemical process using acetic acid dissolved in liquid hydrogen fluoride.
Gas | Tetrafluoromethane |
CAS No. | 75-73-0 |
Purity | ≥99.99% |
Tetrafluoromethane (R-14) is used as a cryogenic fluid for very low temperature applications. Tetrafluoromethane (R-14) is also used as: a neutral, inert gas a refrigerant heat transfer agent solvent propellant chemical intermediate.
Tetrafluoromethane is used, either pure or mixed with oxygen, as an etchant for silicon oxide, silicon nitride, refractory metals, and metal silicides.
Tetrafluoromethane is used in the electronics industry for plasma degreasing of multilayer printed circuit boards.
Tetrafluoromethane is used in the optical fibre production process.
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