All Categories
ENEN

NF₃

Nitrogen Trifluoride

The chemical formula of nitrogen trifluoride is NF₃. It is a colorless, odorless and stable gas at normal temperature. It is a strong oxidant. High purity nitrogen trifluoride has excellent etch rate and selectivity, and it is also a very good cleaning agent. Jinhong can provide you with high-purity nitrogen trifluoride gas to improve your semiconductor process.

Inquiry
  • Overview
  • Application
  • FAQ
  • Inquiry
  • Related Products
Nitrogen Trifluoride
Nitrogen Trifluoride
Nitrogen Trifluoride
Nitrogen Trifluoride
Nitrogen Trifluoride
Nitrogen Trifluoride
Process

Nitrogen trifluoride is prepared by the direct fluorination of Ammonia. It may also be obtained by electrolysis of molten ammonium bifluoride or by direct combination of the elements nitrogen and fluorine using an electrical discharge at low temperatures.

GasNitrogen trifluoride
CAS No.7783-54-2
Purity99.999%
Applications
  • Silicon Processing
    Silicon Processing

    Nitrogen trifluoride is used as a high speed, selective etchant in silicon processing. It has been used to etch silicon, polysilicon, silicon nitride and silicon oxide as well as refractory metals and silicides.

  • Industrial
    Industrial

    Nitrogen trifluoride is sometimes used as the fluorine source in HF /DF chemical lasers. Nitrogen trifluoride is used as a fluorinating agent. Nitrogen trifluoride is also used for fibre treatment.

Frequently Asked Question
  • Q: What’s the specification can you supply?

    Cylinder: 44L     Valve: CGA640     Content: 20kg
    Cylinder: 440L    Valve: CGA640     Content: 200kg
    ISO-20ft         Valve: CGA640     Content: 4000kg
    ISO-40ft         Valve: CGA640     Content: 8000kg

Inquiry
Related Products
HBr
Hydrogen Bromide

ProcessHydrogen bromide is obtained as a by-product during the bromination of organic compounds such as bromomethane. GasHydrogen bromideCAS No.10035-10-6Purity99.999%

Learn More
CHF₃
Trifluoromethane

ProcessThe commercial production of trifluoromethane is carried out by reaction of chloroform with hydrogen fluoride over a chromium catalyst. GastrifluoromethaneCAS No.75-46-7Purity≥99.9%

Learn More
Cl₂
Chlorine

ProcessChlorine is produced commercially by the electrolysis of salt solutions (either sodium, potassium or magnesium chlorides). The production of chlorine is therefore usually accompanied with production of hydrogen. Jinhong is purifying the industr...

Learn More
C₂F₆
Hexafluoroethane

ProcessHexafluoroethane may be obtained as a by-product of CFC production, or by direct fluorination of ethane. GasHexafluoroethaneCAS No.76-16-4Purity99.999%

Learn More
CH₄
Methane

ProcessMethane is the principal constituent of natural gas (typically natural gas is 87% methane). It is therefore commonly produced by purifying natural gas. Pure methane may also be obtained from the cracking of petroleum fractions. GasMethaneCA...

Learn More
SO₂
Sulphur Dioxide

ProcessSulphur dioxide may be produced by a variety of routes, such as the combustion of Sulphur or pyrites, alternatively as a by-product of smelter operations. It can also be prepared by the reaction of an acid on a metallic supplied, or by the acti...

Learn More
NO
Nitric Oxide

ProcessNitric oxide is produced by treating nitric acid with a reducing agent. GasNitric OxideCAS No.10102-43-9Purity99.9%

Learn More
CO
Carbon Monoxide

ProcessThe most common carbon monoxide production plants are “reformers” in which natural gas and steam reacts together to produce CO together with hydrogen. However, there are also many other production techniques such as incomplete combustion of natural...

Learn More
HCL
Hydrogen Chloride

ProcessHydrogen chloride is normally prepared in commercial quantities by the direct combination of chlorine and hydrogen. This is achieved by “burning” chlorine in an atmosphere of hydrogen. Most of the hydrogen chloride produced in this way in normally ...

Learn More
CF₄
Tetrafluoromethane

ProcessTetrafluoromethae may be obtained by the direct fluorination of carbon or by an electro-chemical process using acetic acid dissolved in liquid hydrogen fluoride. GasTetrafluoromethaneCAS No.75-73-0Purity≥99.99%

Learn More
NF₃
Nitrogen Trifluoride

ProcessNitrogen trifluoride is prepared by the direct fluorination of ammonia. It may also be obtained by electrolysis of molten ammonium bifluoride or by direct combination of the elements nitrogen and fluorine using an electrical discharge at low temper...

Learn More

Hot categories

Jinhong Gas Co., Ltd

Copyright © Jinhong Gas Co., Ltd. All Rights Reserved. - Privacy policy|Terms and Conditions