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NF₃

Nitrogen Trifluoride

The chemical formula of nitrogen trifluoride is NF₃. It is a colorless, odorless and stable gas at normal temperature. It is a strong oxidant. High purity nitrogen trifluoride has excellent etch rate and selectivity, and it is also a very good cleaning agent. Jinhong can provide you with high-purity nitrogen trifluoride gas to improve your semiconductor process.

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Nitrogen Trifluoride
Nitrogen Trifluoride
Nitrogen Trifluoride
Nitrogen Trifluoride
Nitrogen Trifluoride
Nitrogen Trifluoride
Process

Nitrogen trifluoride is prepared by the direct fluorination of ammonia. It may also be obtained by electrolysis of molten ammonium bifluoride or by direct combination of the elements nitrogen and fluorine using an electrical discharge at low temperatures.

GasNitrogen trifluoride
CAS No.7783-54-2
Purity99.99%
Applications
  • Silicon Processing
    Silicon Processing

    Nitrogen trifluoride is used as a high speed, selective etchant in silicon processing. It has been used to etch silicon, polysilicon, silicon nitride and silicon oxide as well as refractory metals and silicides.

  • Industrial
    Industrial

    Nitrogen trifluoride is sometimes used as the fluorine source in HF /DF chemical lasers. Nitrogen trifluoride is used as a fluorinating agent. Nitrogen trifluoride is also used for fibre treatment.

Frequently Asked Question
  • Q: What’s the specification can you supply?

    Cylinder: 44L     Valve: CGA640     Content: 20kg
    Cylinder: 440L    Valve: CGA640     Content: 200kg
    ISO-20ft         Valve: CGA640     Content: 4000kg
    ISO-40ft         Valve: CGA640     Content: 8000kg

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