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C₂F₆

Hexafluoroethane

Hexafluoroethane is a colorless, inflammable gas that is insoluble in water but soluble in ethanol. Its boiling point is -78.2°C, the melting point is -100.6°C, and its critical temperature is 19.7°C. Hexafluoroethane is generally used for plasma etching gas in the microelectronics industry, as well as device surface cleaning, optical fiber production, and low temperature refrigeration.

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Hexafluoroethane
Hexafluoroethane
Hexafluoroethane
Hexafluoroethane
Process

Hexafluoroethane may be obtained as a by-product of CFC production, or by direct fluorination of ethane.

GasHexafluoroethane
CAS No.76-16-4
Purity99.999%
Applications
  • Semiconductors
    Semiconductors

    Hexafluoroethane is used for dry etching of silicon dioxide and for stripping photoresist.

  • Refrigerant
    Refrigerant

    Hexafluoroethane is used as a refrigerant in certain low temperature applications and as a component in some refrigerant blends.

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    Cylinder: 44L    Valve: CGA660, DISS716     Content:40kg

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