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Phosphine in Hydrogen

Phosphorane is an important n-type doped source in semiconductor device manufacturing, and it is also used in polysilicon chemical vapor deposition, epitaxial GaP material, ion implantation process, MOCVD process, phosphorous silicon glass (PSG) passivation film preparation and other processes.

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Phosphine in Hydrogen
Phosphine in Hydrogen
Phosphine in Hydrogen
Phosphine in Hydrogen


Chemical NamePhosphineHydrogen
CAS No.7803-51-21333-74-0
UN No.1954
Label elements
  • 1656661073891-ckt

    Signal word: Danger


Physical and chemical properties
Physical state: Gas.
Appearance: Colorless.
Odor: Repulsive.
Odor threshold: 0.51 ppm (PH3)
Autoignition temperature: 38 °C / 100 °F (Phosphine)


Hazard Statements

Fatal if inhaled
Causes severe skin burns and eye damage
Extremely flammable gas
Catches fire spontaneously if exposed to air
Contains gas under pressure; may explode if heated
May form explosive mixtures with air
Symptoms may be delayed


Keep away from heat,sparks,open flames,hot surfaces.
No smoking
Do not breathe gas.
Use and store only outdoors or in a well ventilated place
Wear protective gloves, protective clothing, eye protection, respiratory protection, and/or face protection
Use a backflow preventive device in piping
Use equipment purged with inert gas or evacuated prior to discharge from cylinder
Use only with equipment of compatible materials of construction and rated for cylinder pressure
Do not open valve until connected to equipment prepared for use
Close valve after each use and when empty
When returning cylinder, install leak tight valve outlet cap or plug

Handing and storage

Protect from sunlight when ambient temperature exceeds 52°C/125°F
Store in cool, dry, well-ventilated area of non-combustible construction away from heavily
trafficked areas and emergency exits.
Keep at temperatures below 52°C / 125°F.
Cylinders should be stored upright with valve protection cap in place and firmly secured to prevent falling.
Full and empty cylinders should be segregrated.
Use a "first in-first out" inventory system to prevent full cylinders from being stored for excessive periods of time.
Stored containers should be periodically checked for general condition and leakage.
Outside or detached storage is preferred.

Frequently Asked Question
  • Q: What’s the specification can you supply?

    Gas: PH3/H2   Cylinder: 44L   Valve: DISS632

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